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Author: broman

  • NanoMaterials-Based Devices Lab

    Home
  • Microfluidic Technologies Lab

    Microfluidic Technologies Lab

    https://www.microfluidic-technologies.com/
  • Optical communication laboratory

  • Micro & Nano – Photonics Group

    http://webee.technion.ac.il/labs/micro_photonics/index.htm
  • Advanced Photonics Research Lab

    http://apr.eew.technion.ac.il/  
  • Wet benches for resist development

    Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) Standard set of wafer developing, rinse and dry steps Read More
  • Chrome mask processing tool

    Vendor: Fairchild Convac Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Automated photomask processing unit for chrome and iron oxide mask after exposure Read More
  • Non Uniformity of Gold Free Ohmic Contacts Induced by Non-uniformity of the AIN Spacer Layer in AlGaN/GaN HFETs

    Non Uniformity of Gold Free Ohmic Contacts Induced by Non-uniformity of the AIN Spacer Layer in AlGaN/GaN HFETs

  • Contact Angle Goniometer (Ramé-hart 200)

    Vendor: Ramé-hart, Model: Ramé-hart 200 Contact: Guy Ankonina (04-829-5014, anguy@technion.ac.il) The Model 200 is a robust contact angle tool using Read More
  • Optical Microscope (Zeiss Axiotron)

    Vendor: Zeiss, Model: Axiotron Contact: Yacov Shneider (04-829-4205, shneider@ee.technion.ac.il) Zeiss Axiotron optical microscope is suitable for high quality inspection of Read More
  • Optical Microscopes with a camera (Olympus BX-60)

    Vendor: Olympus, Model: BX-60 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Two Olympus BX-60 optical microscopes are located in the silicon room Read More
  • Optical Microscope (Nikon Labophot-2)

    Vendor: Nikon, Model: Labophot-2 Contact: Yacov Shneider (04-829-4205, shneider@ee.technion.ac.il) Nikon optical microscope is suitable for high quality inspection of small Read More
  • Optical Microscope with a camera (Nikon Eclipse L200)

    Vendor: Nicon, Model: Eclipse L200 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) The Nicon Eclipse L200 optical microscope is used for precise Read More
  • CDs Optical Measurements (Vickers micro-system)

    Vendor: Vickers micro-system, Model: M41 Contact: Tatiana Beker (04-829-3250, tatiana@ee.technion.ac.il)  Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) The Vickers M41 microscope is Read More
  • FPP-5000 Automatic Resistivity Meter

    Vendor: Veeco, Model: FPP-5000 Contact: Yacov Shneider (04-8294205, shneider@ee.technion.ac.il) Measurement of resistive properties of a semiconductor wafer and resistive films. Read More
  • C-V Plotter (MDC)

    Vendor: MDC Contact: Yacov Shneider (04-829-4205, shneider@ee.technion.ac.il) The MDC C-V plotter is a current-voltage measurement system used to analyze the Read More
  • Film stress measurement (Tencor FLX-2320)

    Vendor: Tencor, Model: FLX-2320 Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Flexus (Tencor FLX-2320) is a non-contact thin-film stress measurement instrument Read More
  • Ellipsometer (Woollam M-2000UI)

    Vendor: J. A. Woollam, Model: M-2000UI Contact: Guy Ankonina (04-829-5014, anguy@technion.ac.il) The M-2000UI Ellipsometer is used for measuring the optical Read More
  • Ellipsometer Multi-layer measurements wave length 193-2500nm (Woollam VASE)

    Vendor: J. A. Woollam, Model: VASE Contact: Guy Ankonina (04-829-5014, anguy@technion.ac.il) The VASE (variable angle spectroscopic ellipsometry) Ellipsometer is used Read More
  • Ellipsometer (Rudolph AutoEL II)

    Vendor: Rudolph Technologies, Inc., Model: Rudolph AutoEL II Contact: Valentina Korchnoy (04-829-3894, vkorchno@ef.technion.ac.il) RUDOLPH AutoEL II is a single wavelength, Read More
  • Film thickness measurement (Nanometrics AFT 2100 Nanospec)

    Vendor: Nanometrics, Model: AFT 2100 Nanospec Contact: Tatiana Beker (04-829-3250, tatiana@ee.technion.ac.il) Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) The AFT 2100 Nanospec Read More
  • Surface Profiler (KLA Tencor P-6)

    Vendor: KLA Tencor, Model: P-6 Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) The KLA-Tencor P-6 is a mechanical highly sensitive surface Read More
  • Atomic Force Microscope (Asylum Research/Oxford Instruments MFP-3D Infinity)

    Vendor: Asylum, Model: MFP-3D Infinity AFM Contact: Cecile Saguy (04-829-3547, cecile@si.technion.ac.il) The MFP-3D Infinity is an AFM system that supports Read More
  • Atomic Force Microscope (DI-3000)

    Vendor: Digital Instruments, Model: DI-3000 Contact: Yacov Shneider (04-829-4205, shneider@ee.technion.ac.il),  Assaf Yarden ( 052-5987181, assaf.yarden@gmail.com) Atomic Force Microscope DI-3000 provides Read More
  • HR-SEM (Hitachi S-4700)

    Vendor: Hitachi, Model: S-4700 Contact: Valentina Korchnoy (04-829-3894, vkorchno@ef.technion.ac.il) The Hitachi S-4700 is a field emission scanning electron microscope (FE-SEM), Read More
  • Wire Bonder (TPT HB16)

    Vendor: TPT, Model: HB16 Contact: Yacov Shneider (04-8294205, shneider@ee.technion.ac.il) Thermosonic wire bonder for wedge and ball bonding Specifications: Automatic bond Read More
  • Dicer (Disco DAD3350)

    Vendor: Disco, Model: DAD-3350 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) High speed and accuracy dicing tool. Specifications: Universal chuck can accept Read More
  • Wet etching benches (RCA clean, Buffered Oxide etch, Isotropic Silicon etch, Aluminium etch, Si3N4 etch, Anisotropic Silicon etch (KOH), Chromium etch)

    Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) RCA Clean: Standard set of wafer cleaning steps which Read More
  • ICP Etcher (Plasma-Therm Shuttleline (Chlorine Chemistry))

    Vendor: Plasma-Therm, Model: Shuttleline Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Plasma-Therm Shuttleline is a plasma etcher with Inductively Coupled Plasma Read More
  • ICP Deep RIE (Plasma-Therm Versaline (Fluorine Chemistry))

    Vendor: Plasma-Therm, Model: Versaline Contact: Dr. Orna Ternyak (04-829-4204, ornater@ee.technion.ac.il) Plasm-Therm Versaline is a plasma etcher with Inductively Coupled Plasma Read More
  • Plasma Asher (Axic HF-8)

    Vendor: AXIC, Model: HF-8 Contact: Dr. Orna Ternyak (04-829-4204, ornater@ee.technion.ac.il) The AXIC HF-8 is a plasma tool with capabilities of Read More
  • Rapid Thermal Annealing (Jipelec JetFirst 200HT)

    Vendor: JIPelec, Model: JetFirst 200HT Contact: Valentina Korchnoy (04-829-3250, vkorchno@technion.ac.il) JetFirst200HT is a Rapid Thermal Processing (RTP) tool for R&D Read More
  • Molecular Vapor Deposition (AMTS 100E)

    Vendor: Applied Microstructures (AMST), Model: MVD100E Contact: Guy Ankonina (04-829-5014, anguy@technion.ac.il) Molecular vapor deposition (MVD) system specializes in depositing different Read More
  • Plasma-Assisted Atomic Layer Deposition (Ultratech/Cambridge Nanotech Fiji G2)

    Vendor: Ultratech/CNT, Model: Fiji G2 Contact: Valentina Korchnoy (04-829-3250, vkorchno@technion.ac.il) The Ultratech/CNT Fiji G2 is Plasma Enhanced Atomic Layer Deposition Read More
  • Sputter Deposition (AJA International Inc. ATC 2200)

    Vendor: AJA International, Model: ATC-2200 Contact: Andrey Wolf (04-829-5014 andreyw@technion.ac.il) The ATC 2200 sputtering system is designed to hold up Read More
  • Thermal Evaporator (Vinci PVD-4)

    Vendor: VINCI, Model: PVD-4 Contact: Gavrilov Arkadi (04-829-3250, ark4718@gmail.com) The VINCI is a Physical Vapor Deposition system, dedicated to thermal Read More
  • E-beam Evaporator (Airco Temescal FC 1800)

    Vendor: Airco Temescal, Model: FC-1800 Contact: Gavrilov Arkadi (04-8293250, ark4718@gmail.com) The model FC-1800 (Au) provides thin film coating of virtually Read More
  • E-beam Evaporator (Airco Temescal BJD 1800)

    Vendor: Airco Temescal, Model: BJD-1800 Contact: Gavrilov Arkadi (04-829-3250, ark4718@gmail.com) The model BJD-1800 (Al) provides thin film coating of virtually Read More
  • E-beam Evaporator (Evatec BAK-501A)

    Vendor: Evatec, Model: BAK-501A Contact: Gavrilov Arkadi (04-829-3250, ark4718@gmail.com) The model BAK-501A provides thin film coating of virtually any material Read More
  • Tube Furnaces (BTI-Bruce RTRI-878)

    Vendor: Bruce Technologies Inc., Model: BDF-4 RTRI-878 & BDF-4 RTRI-880 Contact: Eran Lipp (04-829-4205, lipp@technion.ac.il) Bruce Technologies Inc. BDF-4 RTRI-878, 4-stack furnace Read More
  • E-Beam Lithography (Raith EBPG 5200)

    Vendor: Raith, Model: EBPG5200 Contact: Dr. Adi Goldner (04-829-3881, adigold@ef.technion.ac.il) Electron beam lithography is a direct write technique for Micro Read More
  • Wet benches for resist stripping and cleaning

    Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) Standard set of photo resist strip, solvent clean, rinse Read More
  • Wet bench for resist coating and bakes

    Vendor: PV-Plast Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il)  Dima Peselev (04-8295125, pesel@ee.technion.ac.il) The bench is located in the Silicon yellow room Read More
  • Flood Exposure Tool (OAI-150)

    Vendor: OAI, Model: OAI-150 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Highly efficient Stand-alone light source tool. Specifications: High pressure 500W mercury Read More
  • Dry Film Laminator (JSE JSL-1200)

    Vendor: JSE Co., Model: JSE JSL-1200 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Simple and effective tool for dry film photoresist laminating Read More
  • Vacuum Oven with NH3 for reversal image (YES-310TA(E))

    Vendor: Yield Engineer Systems Co, Model: YES-310TA(E) Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Low-pressure NH3 oven for image reversal or dehydration Read More
  • Automatic Developer (Suss MicroTec Delta 8+)

    Vendor: Suss MicroTec, Model: Delta 8 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Semi-automatic high precision developing tool. Specifications: Multiple steps recipes. Read More
  • Automatic Coater (Suss MicroTec Delta 80 RC)

    Vendor: Suss MicroTec, Model: RC-80 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Semi-automatic high precision tool for adhesion promoter (HMDS) and resist Read More
  • Contact Mask Aligner (KARL SUSS MJB3)

    Vendor: KARL SUSS, Model: MJB3 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Contact Mask Aligner for III-V semiconductors: KARL SUSS MJB3 Contact Read More
  • Contact Mask Aligner (KARL SUSS MA-6)

    Vendor: KARL SUSS, Model: MA6 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Contact and proximity mask aligner. Specifications: 350W high-pressure mercury lamp Read More
  • Laser Lithography System (Heidelberg Instruments DWL 66+)

    Vendor: Heidelberg Instruments, Model: DWL 66+ Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) The DWL 66+ laser lithography system is a high-resolution Read More
  • Plasma-Enhanced Chemical Vapor Deposition (PE-CVD)

    Vendor: Plasma-Therm, Model: Vision 410 Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Plasma-Therm Vision 410 is a 16-inch diameter parallel plate, Read More
  • Reactive Ion Etching (RIE)

    Vendor: Plasma-Therm, Model: 790 Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Plasma-Therm 790 is an 8-inch diameter parallel plate, PC-controlled, turbo-pumped Read More
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