E-beam Evaporator (Airco Temescal FC 1800)

Vendor: Airco Temescal, Model: FC-1800

Contact: Gavrilov Arkadi (04-8293250, ark4718@gmail.com)

The model FC-1800 (Au) provides thin film coating of virtually any material quickly, cleanly and efficiently.  Our system is equipped with 10 kW e-Gun power supply, 6 pocket material source, and thickness monitoring. A variety of evaporation source materials are available. The use of multi-source crucible allows deposition of multilayers of six or more materials. A quartz crystal thickness controller is used for programming multilayers as well as for the automatic control of the thickness and of the deposition rate in each layer. A base pressure in the system is 1 x 10-7 Torr. The vacuum recommended for deposition is 2 x 10-6 Torr or better. The sample holder is planar, with a possibility of tilt and rotation.


  • Cryogenic pump
  • 6 pocket crucible
  • Load lock camera
  • Working distance 450 mm
  • 2”x 15 & 4”x 3 wafer holders with rotation
  • Materials: Al, Ti, Pt, Ni, NiCr, Cr, Au