Wet benches for resist stripping and cleaning

Vendor: PV-Plast, Model: ICD Heateflex Bath

Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il)

Standard set of photo resist strip, solvent clean, rinse and dry steps

  1. Heated NMP bath
  2. Heated PRS bath
  3. Ultrasonic bath
  4. Variable solvents bottles
  5. DI water cascade
  6. Spin dry