Contact Mask Aligner (KARL SUSS MA-6)

Vendor: KARL SUSS, Model: MA6

Contact: Dima Peselev (04-8295125,

Contact and proximity mask aligner.


  • 350W high-pressure mercury lamp broad band exposure, 405nm monochromatic filter available.
  • Soft, hard, low vacuum, vacuum contact; proximity and flood exposure modes
  • Up to 1um resolution
  • Dual microscope alignment system
  • Advanced optical filters (AFP)
  • Optical backside alignment system (BSA)
  • Mask size: from 3″ to 7” glass or quartz masks
  • Sample size: from 2x2mm substrates up to 6″ wafers