Ellipsometer Multi-layer measurements wave length 193-2500nm (Woollam VASE)

Vendor: J. A. Woollam, Model: VASE

Contact: Guy Ankonina (04-829-5014, anguy@technion.ac.il)

The VASE (variable angle spectroscopic ellipsometry) Ellipsometer is used for measuring the optical properties of different materials such as metals semiconductors dielectrics and polymers with high accuracy.


  • Spectroscopic scans at different angles from 15° to 90° with resolution of 0.02°
  • Wide spectral range: 240-2500nm with resolution of 2Å
  • Isotropic and anisotropic measurements
  • Reflectance and transmittance measurements
  • XY mapping
  • Heating Stage (up to 300°C)
  • WVASE32 software