Optical Microscopes with a camera (Olympus BX-60)

Vendor: Olympus, Model: BX-60

Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)

Two Olympus BX-60 optical microscopes are located in the silicon room and in the III-V room. Both of them are equipped with a digital camera projecting optical images on a PC screen. Pictures and video can be stored and exported for measurements of micrometric features and further processing. The microscopes are suitable for inspection of wafers and photo masks for development work and educational purposes.


  • Objectives x5, x10, x20, x50, x100
  • Transmitted and Reflected Light
  • Brightfield/Darkfield for Reflected Light
  • UV filter for photoresist pattern inspection
  • Pair of 10x/26.5mm Eyepieces
  • 12V 100watt Transmitted and Reflected Light Sources
  • 2″ x 3″ Mechanical Stage