Automatic Coater (Suss MicroTec Delta 80 RC)

Vendor: Suss MicroTec, Model: RC-80

Contact: Dima Peselev (04-8295125,

Semi-automatic high precision tool for adhesion promoter (HMDS) and resist coating


  • HMDS vapor deposition with substrate heating.
  • Multiple steps recipes.
  • Gyrset setup available for rectangular substrate
  • Speed: Up to 3000rpm with and 5000rpm without Gyrset.
  • Automatic PR dispense available
  • EBR edge clean
  • High accuracy heating plate up to 250C attached
  • Substrate from 10x10mm2 to 6” wafers