Characterization and Analysis HR-SEM (Hitachi S-4700) Atomic Force Microscope (DI-3000) Atomic Force Microscope (Asylum Research/Oxford Instruments MFP-3D Infinity) Surface Profiler (KLA Tencor P-6) Film thickness measurement (Nanometrics AFT 2100 Nanospec) Ellipsometer (Rudolph AutoEL II) Ellipsometer Multi-layer measurements wave length 193-2500nm (Woollam VASE) Ellipsometer (Woollam M-2000UI) Film stress measurement (Tencor FLX-2320) C-V Plotter (MDC) FPP-5000 Automatic Resistivity Meter CDs Optical Measurements (Vickers micro-system) Optical Microscope with a camera (Nikon Eclipse L200) Optical Microscope (Nikon Labophot-2) Optical Microscopes with a camera (Olympus BX-60) Optical Microscope (Zeiss Axiotron) Contact Angle Goniometer (Ramé-hart 200) Clara4 SEM Raman WITec (alpha300)
