Material Deposition and Annealing Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) Tube Furnaces (BTI-Bruce RTRI-878) E-beam Evaporator (Evatec BAK-501A) E-beam Evaporator (Airco Temescal BJD 1800) E-beam Evaporator (Airco Temescal FC 1800) Thermal Evaporator (Vinci PVD-4) Sputter Deposition (AJA International Inc. ATC 2200) Plasma-Assisted Atomic Layer Deposition (Ultratech/Cambridge Nanotech Fiji G2) Molecular Vapor Deposition (AMTS 100E) Rapid Thermal Annealing (Jipelec JetFirst 200HT)
