Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) Standard set of wafer developing, rinse and dry steps Read More
Category: Photolithography
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Vendor: Fairchild Convac Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Automated photomask processing unit for chrome and iron oxide mask after exposure Read More -
Vendor: AXIC, Model: HF-8 Contact: Dr. Orna Ternyak (04-829-4204, ornater@ee.technion.ac.il) The AXIC HF-8 is a plasma tool with capabilities of Read More -
Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) Standard set of photo resist strip, solvent clean, rinse Read More -
Vendor: PV-Plast Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) Dima Peselev (04-8295125, pesel@ee.technion.ac.il) The bench is located in the Silicon yellow room Read More -
Vendor: OAI, Model: OAI-150 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Highly efficient Stand-alone light source tool. Specifications: High pressure 500W mercury Read More -
Vendor: JSE Co., Model: JSE JSL-1200 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Simple and effective tool for dry film photoresist laminating Read More -
Vendor: Yield Engineer Systems Co, Model: YES-310TA(E) Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Low-pressure NH3 oven for image reversal or dehydration Read More -
Vendor: Suss MicroTec, Model: Delta 8 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Semi-automatic high precision developing tool. Specifications: Multiple steps recipes. Read More -
Vendor: Suss MicroTec, Model: RC-80 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Semi-automatic high precision tool for adhesion promoter (HMDS) and resist Read More -
Vendor: KARL SUSS, Model: MJB3 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Contact Mask Aligner for III-V semiconductors: KARL SUSS MJB3 Contact Read More -
Vendor: KARL SUSS, Model: MA6 Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) Contact and proximity mask aligner. Specifications: 350W high-pressure mercury lamp Read More -
Vendor: Heidelberg Instruments, Model: DWL 66+ Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il) The DWL 66+ laser lithography system is a high-resolution Read More -
Vendor: Heidelberg Instruments, Model: MLA 150 Contact: Amit Shacham (04-8293894, amitsh@technion.ac.il) The MLA 150 laser lithography system is a high-resolution Read More