Etching Reactive Ion Etching (RIE) ICP Etcher (Plasma-Therm Shuttleline (Chlorine Chemistry)) ICP Deep RIE (Plasma-Therm Versaline (Fluorine Chemistry)) Wet etching benches (RCA clean, Buffered Oxide etch, Isotropic Silicon etch, Aluminium etch, Si3N4 etch, Anisotropic Silicon etch (KOH), Chromium etch)
