The model VINCI PVD-20 provides thin film coating of virtually any material quickly, cleanly and efficiently.Our system is equipped with 10 kW e-Gun power supply, 6 pocket material source, thickness monitoring, sample heater, and indirect temperature monitoring up to 900˚C. The use of multi-source crucible allows deposition of multilayers of six or more materials. A quartz crystal thickness controller is used for programming multilayers as well as for the automatic control of the thickness and of the deposition rate in each layer This system also uses a thermal evaporation process with two sources. Therefore, this tool can use two spray sources at once: both E-gan and Thermal, which makes it possible to co-deposition. This unit also has Ar plasma for removing the native oxide. . A base pressure in the system is 1 x 10-7 Torr. The vacuum recommended for deposition is 2 x 10-6 Torr or better. The sample holder is planar and rotatable.
Specification:
Cryogenic pump
6 pocket crucible
Up to 2 sources (boats, rods, baskets, filament, etc.)
6″ wafer holder with rotation
Ion surce
Working distance 500 mm
Materials: Al, Au, Ti, Cu, Ag, Cr