Etching Archives -

Wet etching benches (RCA clean, Buffered Oxide etch, Isotropic Silicon etch, Aluminium etch, Si3N4 etch, Anisotropic Silicon etch (KOH), Chromium etch)

Vendor: PV-Plast, Model: ICD Heateflex Bath Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il) RCA Clean: Standard set of wafer cleaning steps which Read More

ICP Etcher (Plasma-Therm Shuttleline (Chlorine Chemistry))

Vendor: Plasma-Therm, Model: Shuttleline Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Plasma-Therm Shuttleline is a plasma etcher with Inductively Coupled Plasma Read More

ICP Deep RIE (Plasma-Therm Versaline (Fluorine Chemistry))

Vendor: Plasma-Therm, Model: Versaline Contact: Dr. Orna Ternyak (04-829-4204, ornater@ee.technion.ac.il) Plasm-Therm Versaline is a plasma etcher with Inductively Coupled Plasma Read More

Reactive Ion Etching (RIE)

Vendor: Plasma-Therm, Model: 790 Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il) Plasma-Therm 790 is an 8-inch diameter parallel plate, PC-controlled, turbo-pumped Read More