Vendor: SAFThermo
Specifications:
- Process up to 1050°C with 2’’ and 4’’ quartz tube.
- Option to process in vacuum or various gas atmospheres (Ar, H2, O2) for annealing and residues stripping.
1. Furnace with dry scroll vacuum pump (up to 10-3 mbar).
2. Furnace equipped with turbomolecular pump (up to 10-6 mbar).