Vendor: Suss MicroTec, Model: Delta 8
Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)
Semi-automatic high precision developing tool.
Specifications:
- Multiple steps recipes.
- Paddle and spray developing modes
- High accuracy heating plate up to 250C attached
- Substrate from 10x10mm2 to 6” wafers