Vendor: KARL SUSS, Model: MJB3
Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)
Contact Mask Aligner for III-V semiconductors: KARL SUSS MJB3 Contact UV 400
Specifications:
- 350W high-pressure mercury lamp broadband exposure
- Manually operated with a single objective optical microscope
- Resolution: The “vacuum contact” option extends the resolution to 2 microns, The “standard soft” and “hard contact” modes give resolution up to 2.5um
- Mask size: from 3″glass or quartz masks
- Sample size: up to 3″ wafers