Wet benches for resist development

Vendor: PV-Plast, Model: ICD Heateflex Bath

Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il)

Standard set of wafer developing, rinse and dry steps

1. Std TMAH 2.5% bath
2. Variable developing bath
3. DI water cascade
4. Spin dry