Vendor: PV-Plast
Contact: Tatiana Becker (04-8293250, tatiana@ee.technion.ac.il)
Dima Peselev (04-8295125, pesel@ee.technion.ac.il)
The bench is located in the Silicon yellow room of Wolfson clean rooms. The bench consists of a large work surface area, two Headway spinners, three hot plates, MEMMERT convection oven and resists chemical storage area.
Digital photoresist spinner (EC101D)
- 2 types: for 2” and 4” wafers
- 4″ with PWM32 Controller
- 2″ with EC-101D\PM-101D motor controller and foot switch
- Speed range: 50 to 10,000 rpm
Hot plate (Dataplate PMC series 730)
- Microprocessor Based Control of Temperature and Stirrer
- Digital Display
- Precise Control of Temperature, Stirrer Speed, Time/Temperature/Ramp
- Built-in RTD Temperature Sensor Controls the Temperature at Plate Surface
Hot plate with stirrer (Velp scientifica)
- Heating plate diameter: 155 mm
- Temperature regulation: form room temperature to 250 °C
Convection oven (Memmert)
The Memmert ‘U’ universal oven range offer unparalleled precise, even and gentle temperature control for a diverse range of applications such as experiments with highly sensitive loads, drying or baking polymers, photoresists, resins or outgassing parts. Precise and homogenous temperature control and stainless steel inside.
- Temperature range up to +300 °C
- Size 30L
- Model variant: SingleDISPLAY
- Natural convection or forced air circulation
- Programming display