Vendor: KLA Tencor, Model: P-6
Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il)
The KLA-Tencor P-6 is a mechanical highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The profiler acquires data using stylus-based scanning by moving the stylus on the sample surface and applying a constant force of several mg. Vertical movements of the stylus are sensed by a transducer, digitized and stored in the memory for later plot manipulation. The common applications are: surface roughness, photoresist thickness (when optical measurement is not possible), depth of etched trenches, thickness of deposited material post lift-off, etc.
Specifications:
- 2-D surface topography measurements
- Three range of depth measurements:
- ±5µm (13 total) with vertical resolution of 0.008Å
- ±32µm (64 total) with vertical resolution of 0.04Å
- ±173 (327 total) with vertical resolution of 0.2Å
- Applied force from 0.5 to 50mg
- Motorized stage up to 6″ with vacuum holder
- Scanning stylus: 2-micron radius tip
- Optical system for surface visualization
- Possibility of multiple site measurement in one sequence recipe