Vendor: Airco Temescal, Model: BJD-1800
Contact: Gavrilov Arkadi (04-829-3250, ark4718@gmail.com)
The model BJD-1800 (Al) provides thin film coating of virtually any material quickly, cleanly and efficiently. Our system is equipped with 10 kW e-Gun power supply, 4 pocket material source, thickness monitoring, sample heater, and indirect temperature monitoring. A variety of evaporation source materials are available. A base pressure in the system is 2 x 10-7 Torr. The vacuum recommended for deposition is 2 x 10-6 Torr or better. Planar and planetary rotatable sample holders are available.
Specification:
- Cryogenic pump
- 4 pocket crucible
- Semiautomatic valve sequencer
- 2”x 20 & 4”x 6 wafer holders with rotation
- Working distance 400 mm
- Materials: Al, Al/Si/Cu, Ti, Ti/W, Si