Vendor: KARL SUSS, Model: MA6
Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)
Contact and proximity mask aligner.
Specifications:
- 350W high-pressure mercury lamp broad band exposure, 405nm monochromatic filter available.
- Soft, hard, low vacuum, vacuum contact; proximity and flood exposure modes
- Up to 1um resolution
- Dual microscope alignment system
- Advanced optical filters (AFP)
- Optical backside alignment system (BSA)
- Mask size: from 3″ to 7” glass or quartz masks
- Sample size: from 2x2mm substrates up to 6″ wafers