Vendor: Tescan, Model: CLARA4 LMH UHR SEM
Clara4 is BrightBeam™ field-free UHR analytical FE-SEM with Schottky electron source, energy and angular selective in-column SE and BSE detectors. It is capable of high-resolution imaging and specimen topography study from nanometers to millimeters. The combination of the electron column design and the detection system results in excellent imaging performance at low-beam energies down to 50 eV which is ideal for imaging all types of nonconducting samples without charging artifact or sample damage.
A potential tube through the whole column keeps electrons at an energy that is higher than the electron beam landing energy and as a result, electrostatic interactions within the beam are reduced. In addition, this significantly reduces optical aberrations especially at low beam energies. It is equipped with Beam Deceleration mode which allows an ultimate resolution up to 1.2 nm at low acceleration voltages. Low vacuum mode (and a special Low vacuum SE detector) is used for analysis of beam sensitive and non-conductive materials.
Specifications:
- Electron Beam Energy: 50 eV to 30 keV
- Beam Deceleration mode
- In-chamber Plasma Cleaner
- Resolution: 0.9 nm at 15 keV; 1.4 nm resolution at 1 kV; 1.2 nm at 1kV in Beam Deceleration mode
- Maximum Field of View: 21 mm at WD 30 mm
- Probe current: 2 pA to 400 nA
- PC-controlled five axis compucentric fully motorized stage
- Specimen stage rotation 360˚ in continuous mode
- Specimen tilt -80° to +80°
- Sample size up to 100 mm diameter, 49 mm height
- Detectors:
- In-chamber detector of Everhart-Thornley type (ET)
- In-Beam Axial detector: annular, scintillator-based (Axial)
- In-Beam Multidetector: contains a grid for energy filtration (MD)
- Low Vacuum SE detector for low-vacuum operations up to 500 Pa
- Image: 16,384 x 16,384 pixels, adjustable separately for live image and for stored images
- SEM presets: to store SEM parameters, including stage position, detectors used, and alignments.