Vendor: Nicon, Model: Eclipse L200
Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)
The Nicon Eclipse L200 optical microscope is used for precise optical inspection of wafers and photo masks. The microscope is equipped with a camera projecting images on a PC screen. The MicroLine software (by Micro-Metric company) allows critical dimension programmable measurements of sub-micron features. It includes automatic adjustment of image illumination and autofocusing.
Specifications:
- Objectives x10, x50, x100
- 6″ stage
- Bright Field (in reflection) / Dark Field (in transmission)
- Saving pictures (disk-on-key)
- Reflection and transmission modes
- Possibility for measurement automatic recipes