Vendor: Suss MicroTec, Model: RC-80
Contact: Dima Peselev (04-8295125, firstname.lastname@example.org)
Semi-automatic high precision tool for adhesion promoter (HMDS) and resist coating
- HMDS vapor deposition with substrate heating.
- Multiple steps recipes.
- Gyrset setup available for rectangular substrate
- Speed: Up to 3000rpm with and 5000rpm without Gyrset.
- Automatic PR dispense available
- EBR edge clean
- High accuracy heating plate up to 250C attached
- Substrate from 10x10mm2 to 6” wafers