Vendor: Edwards, Model: E306A
Contact: Gavrilov Arkadi (04-829-3250, ark4718@gmail.com)
The 306A is a manually controlled thermal evaporator, uses a standard resistive filament evaporation source (up to 90Amp), and quartz bell jar deposition chamber. The tool incorporates a diffusion pump as the high vacuum pump and reaches a base pressure of 5.0 x 10-6 Torr. The system is equipped with a quartz crystal monitor for manual thickness control. The tool is dedicated to deposition of Indium and Tin.
Specification:
- Diffusion pump
- One power source
- Working distance 140 mm
- 3”x1 wafer holders
- Materials: In, Sn