Vendor: VST, Model: TDFS-184
Contact: Gavrilov Arkadi (04-8293250, ark4718@gmail.com)
The model TDFS-184 provides thin film coating of virtually any material quickly, cleanly and efficiently. Our system is equipped with 10 kW e-Gun power supply, 6 pocket material source, and thickness monitoring. A variety of evaporation source materials are available. A base pressure in the system is 3 x 10-7 Torr. The vacuum recommended for deposition is 2 x 10-6 Torr or better. The sample holder is planar, with a possibility of tilt and rotation.
Specification:
- Cryogenic pump
- 6 pocket crucible
- Semiautomatic valve sequencer
- Working distance 550 mm
- 2”x2 & 4”x1 wafer holders
- Materials: Al, Au, Cu, Ti, Ti/W, Ni, NiCr, Pt, Gd, Sm, Sc, Cr, Co, Fe, Mo, Ge, Pd, CaF2, Al2O3, StF2, Vd