Vacuum Oven with NH3 for reversal image (YES-310TA(E))

Vendor: Yield Engineer Systems Co, Model: YES-310TA(E)

Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)

Low-pressure NH₃ oven for image reversal or dehydration processes.

Specifications:

• Heated Chamber: 30°C – 150°C
• Can process a cassette of 4” or 6” wafers at once