Thermal Evaporator (Edwards E306A)

Vendor: Edwards, Model: E306A

Contact: Gavrilov Arkadi (04-8293250, ark4718@gmail.com)

The 306A is a manually controlled thermal evaporator, uses a standard resistive filament evaporation source (up to 90Amp), and quartz bell jar deposition chamber.  The tool incorporates a diffusion pump as the high vacuum pump and reaches a base pressure of 5.0 x 10-6 Torr. The system is equipped with a quartz crystal monitor for manual thickness control. The tool is dedicated to deposition of Indium and Tin.

Specification:

  • Diffusion pump
  • One power source
  • Working distance 140 mm
  • 3”x1 wafer holders
  • Materials: In, Sn