Surface Profiler (KLA Tencor 500)

Vendor: KLA Tencor, Model: Alpha-Step 500

Contact: Dr. Orna Ternyak (04-829-4204, ornater@technion.ac.il)

Tatiana Beker (04-829-3250, tatiana@ee.technion.ac.il)

KLA Tencor Alpha-Step 500 is a computerized, mechanical, stylus-based, high-sensitivity surface profiler that provides two dimensional analysis of surface topography on various surfaces. The profiler acquires data by moving the stylus on the sample surface and applying a constant force of several mg. Vertical movements of the stylus are sensed by a transducer, digitized and stored in the memory for later plot manipulation. The common applications are: surface roughness, photoresist thickness (when optical measurement is not possible), depth of etched trenches, thickness of deposited material post lift-off, etc.

Specifications:

  • 2-D surface topography measurements
  • Two range of depth measurements:
    • ±5µm with vertical resolution of 1Å (range “13 µm /1Å”)
    • ±150µm with vertical resolution of 25Å (range “300µm /25Å”)
  • Scanning stylus: 5-micron radius tip, 60°angle
  • Optical system for surface visualization with magnification x50
  • 6″ stage with x-y-z movement mechanism