Surface Profiler (KLA Tencor 200)

Vendor: KLA Tencor, Model: Alpha-Step 200

Contact: Tatiana Beker (04-829-3250, tatiana@ee.technion.ac.il)

KLA Tencor Alpha-Step 200 is a 2D computerized stylus-based surface profiler that auto-levels and auto-scales step heights up to 160 kA in the kA mode or up to 160 µm in the µm mode. The system is used for quick scans of single steps.

Specifications:

  • Manual wafer loading
  • Scan Lengths up to 10 mm
  • Two ranges of depth measurements:
    • ±160kA with vertical resolution of 5Å (angstrom range(
    • ±160µm with vertical resolution of 50Å (micro-meter range)
  • Horizontal resolution: 400 Angstrom
  • Vertical sensitivity: 20 Å to 50 Å
  • Zoom optics with magnification x40 to x120
  • Stage size is 4″