I-V probe station (SPA Agilent 4155C, Keithley 2400 I-V metter)

Analyzer Vendor: Agilent, Model: 4155C. Probe station Vendor: Suss, model: EP4

Contact: Yacov Shneider (04-8294205, shneider@ee.technion.ac.il)

Four-point probe station combined with Keithley semiconductor characterization system for C-V und I-V measurements.
Interactive DC device characterization, real-time plotting, and analysis with high precision sub-femtoamp
resolution.
Device and wafer testing with combined I-V and C-V measurements, e.g. 4-point probe van der Pauw resistivity measurements.

Specifications:

  • The probe station is equipped with a complete Motic SMZ 140 Stereo Zoom microscope with two 15X eyepieces and 15x – 60x magnification with working distance 80 mm
  • The substrate chuck accommodates wafers and substrates up to 100 mm (4”)
  • The Agilent 4155C includes I/CV 2.1 Lite version software
  • The Agilent 4155C have a built in C-V measurement and quasi-static C-V capabilities