HR-SEM (Hitachi S-4800)

Vendor: Hitachi, Model: S-4800

Contact: Valentina Korchnoy (04-829-3894, vkorchno@ef.technion.ac.il)

The Hitachi S-4800 is a field emission scanning electron microscope (FE-SEM), capable of high resolution imaging and specimen topography study from nanometers to millimeters. It uses an electron beam to image the surface of solid materials. Under optimal working conditions, it can magnify images upwards of 800,000 times and resolve features to 1 nanometer. The electron source is a cold FE gun producing high brightness with little energy spread. Hitachi S-4800 provides both: high-resolution topographic contrast secondary electron (SE) imaging and atomic number contrast backscattered electron (BSE) imaging.

Specifications:

  • Accelerating voltage range: 0.5 – 30 kV (variable at 0.1 kV/step)
  • 2.0 nm resolution at 1kV; 1.0 nm resolution at 15 kV
  • Magnification range: from 20X to 800.000X
  • PC-controlled five axis motorized eucentric stage
  • Specimen stage rotation 360˚ in continuous mode
  • Specimen tilt at 8 mm working distance (WD) from -5˚ up to 45˚
  • Sample size up to 110 mm diameter, up to 17 mm high
  • Two secondary electron (SE) detectors: one above the objective lens, the other below
  • Backscatter imaging with YAG (yttrium aluminum garnet) retractable BSE detector
  • Digital image acquisition at 640 x 480 pixels, 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels
  • Fully digital imaging, image processing and archiving system