E-beam Evaporator (Airco Temescal BJD 1800)

Vendor: Airco Temescal, Model: BJD-1800

Contact: Gavrilov Arkadi (04-8293250, ark4718@gmail.com)

The model BJD-1800 (Al) provides thin film coating of virtually any material quickly, cleanly and efficiently.  Our system is equipped with 10 kW e-Gun power supply, 4 pocket material source, thickness monitoring, sample heater, and indirect temperature monitoring.  A variety of evaporation source materials are available.  A base pressure in the system is 2 x 10-7 Torr. The vacuum recommended for deposition is 2 x 10-6 Torr or better. Planar and planetary rotatable sample holders are available.

Specification:

  • Cryogenic pump
  • 4 pocket crucible
  • Semiautomatic valve sequencer
  • 2”x 20 & 4”x 6 wafer holders with rotation
  • Working distance 400 mm
  • Materials: Al, Al/Si/Cu, Ti, Ti/W, Si