Contact Mask Aligner with BSA (KARL SUSS MJB3)

Vendor: KARL SUSS, Model: MJB3

Contact: Dima Peselev (04-8295125, pesel@ee.technion.ac.il)

Contact Mask Aligner for III-V semiconductors: KARL SUSS MJB3 Contact UV 400

Specifications:

  • 350W high-pressure mercury lamp broadband exposure
  • Manually operated with a single objective optical microscope
  • Resolution: The “vacuum contact” option extends the resolution to 2 microns, The “standard soft” and “hard contact” modes give resolution up to 2.5um
  • Mask size: from 3″glass or quartz masks
  • Sample size: up to 3″ wafers